Nanowire photo-detector grown on a back-side illuminated image sensor

ABSTRACT

An embodiment relates to a device comprising a substrate having a front side and a back-side, a nanowire disposed on the back-side and an image sensing circuit disposed on the front side, wherein the nanowire is configured to be both a channel to transmit wavelengths up to a selective wavelength and an active element to detect the wavelengths up to the selective wavelength transmitted through the nanowire.

RELATED APPLICATIONS

This application is a continuation to U.S. patent application Ser. No.12/633,323, filed Dec. 8, 2009, Attorney Docket No. 095035-0380239,which is incorporated herein in its entirety by reference. Thisapplication relates to U.S. patent application Ser. No. 12/270,233,filed Nov. 13, 2008, entitled “VERTICAL WAVEGUIDES WITH VARIOUSFUNCTIONALITY ON INTEGRATED CIRCUITS,” which is related to U.S. patentapplication Ser. No. 12/633,297, filed Dec. 8, 2009, Attorney Docket No.095035-0383507, entitled “MANUFACTURING NANOWIRE PHOTO-DETECTOR GROWN ONA BACK-SIDE ILLUMINATED IMAGE SENSOR,” and to U.S. patent applicationSer. No. 12/621,497, filed Nov. 19, 2009, Attorney Docket No.095035-0381955, entitled “NANOWIRE CORE-SHELL LIGHT PIPES,” which areincorporated herein in their entireties by reference.

FIELD OF INVENTION

The embodiments relate to light detecting devices such as a photodiode(PD) comprising of a nanowire grown on a back-side-illuminated imagesensor.

BACKGROUND

An image sensor has a large number of identical sensor elements(pixels), often greater than 1 million, in a Cartesian (square) grid.The distance between adjacent pixels is called the pitch (p). For squarepixels, the area of a pixel is p². The area of the photosensitiveelement, i.e., the area of the pixel that is sensitive to light forconversion to an electrical signal, is normally only about 20% to 30% ofthe overall surface area of the pixel.

Conventional color image sensors are fabricated with colored filtersarranged in a Bayer configuration. A common example of a conventionalBayer filter pattern has a color scheme including red, green, and bluefilters (RGB). The Bayer filter pattern is 50% green, 25% red and 25%blue, hence is also referred to GRGB or other permutation such as RGGB.In this arrangement, there are twice as many green elements as red orblue. This is used to mimic the human eye's greater sensitivity to thegreen light.

The complementary metal-oxide semiconductor (CMOS) Image Sensor (CIS)has been one of the early adopters of 3D integrated circuits (IC)integration offering low cost/high volume cameras for cell phones andother applications. One type of CIS is the back-side-illuminated (BSI)CIS. Smaller pixels result in higher resolution, smaller devices, andlower power and cost. Shrinking the pixel size in CMOS image sensorsshould be designed without degrading performance and image quality. Assmaller and smaller pixels are fabricated on CMOS image sensors,however, the area of the photosensitive region becomes smaller thusleading to image quality deterioration.

The trends in BSI CIS are described in an article entitled “BacksideIllumination (BSI) Architecture next for CMOS Image Sensors,”Semiconductor International, Aug. 3, 2008.

To solve this problem, companies worked on backside-illuminated (BSI)technology. OmniVision is an illustrative embodiment of such companies.OmniVision announced in May 2008 that it had developed the OmniBSI™technology that involves turning the image sensor upside down andapplying the color filters and micro lenses to the backside of thepixels so that the sensor can collect light through the area that has nocircuitry, i.e. the backside.

The reason for the better performance of the BSI is higher fill factor,i.e. the amount of light that can be collected in a single pixel. Thevarious metal layers on top of a front-illuminated sensor limit thelight that can be collected in a pixel. As pixel sizes get smaller, thefill factor gets worse. BSI provides the most direct path for light totravel into the pixel, avoiding light blockage by the metal interconnectand dielectric layers on the top-side of the sensor die (see FIG. 1;source: OmniVision). In FIG. 1, the FSI pixel is a front sideilluminated pixel while the BSI pixel is a back-side illuminated pixel.Note that as shown in FIG. 1, the terms back and front in BSI and FSIrelates to the side from where the pixel is illuminated with relation tothe side where the various metal layers are located.

OmniVision's BSI CMOS sensor has a pixel size of 0.9-1.4 μm for an8-megapixel product. On the heels of the OmniVision announcement, Sonyannounced a BSI technology for CMOS sensors for 5-Mpixel camcorders ordigital cameras with 1.75 μm CMOS pixel technology.

ST Micro has also demonstrated the feasibility of manufacturing3-megapixel 1.45 μm CMOS image sensors using BSI technology. It claimsto obtain a quantum efficiency (QE) (QE=the percentage of photons thatare converted into electrons) of greater than 60%.

ST Micro's technology is based on SOi, wafer bonding and thinningtechnologies. In the ST Micro BSI scheme, after the final metal layersare created, a passivation layer and subsequent oxide wafer-bondinglayer (WBL) are deposited. The WBL is planarized and a support wafer isbonded to the processed wafer, the CIS wafer is then thinned. ReportedST Micro Process flow:

-   -   SOI wafer    -   CMOS process    -   Wafer bonding layer (WBL) deposit and planarize    -   Wafer bonding    -   Thinning    -   Anti-reflective coating (ARC)    -   Pad opening    -   Color filters and micro-lens attached

A quick search of the patent landscape turned up U.S. Pat. No. 6,429,036“Backside illumination of CMOS image sensor” (Micron); U.S. Pat. No.5,244,817 “Method of making backside illuminated image sensors” (Kodak);US Pub. No. 2007/0152250 “CMOS image sensor with backside illumination”(MagnaChip); US Pub. No. 2008/0044984 “Methods of avoiding waferbreakage during manufacture of backside illuminated image sensors.”(TSMC); U.S. Pat. No. 6,168,965 “Method for Making Backside IlluminatedImage Sensor” (Tower Semi); US Pub. No. 2007/0052050 “Backside thinnedimage sensor with integrated lens stack” (IMEC).

Sarnoff (now a subsidiary of SRI International) has also announced entryinto the CIS technology arena. At the 2008 Semicon West, Sarnoffintroduced Ultra-Sense™, a thinning technology that they have developedfor high-performance, SOI based, back-illuminated image sensors. Afterprocesses are completed on the frontside of the CIS wafer, the waferbackside is thinned. Sarnoff indicated that its backside thinningprocess using SOI wafers gives better control of the thinning processthat improves pixel quality, lowers cost and improves the yield. Inorder to distinguish the three components of light so that the colorsfrom a full color scene can be reproduced, the image sensors is the useof RBG filters such that two of the components of light are filtered outfor each pixel using a filter. For example, the red pixel has a filterthat absorbs green and blue light, only allowing red light to pass tothe sensor. Thus, generally less than about one-third of the photonimpinging on the image sensor are transmitted to the photosensitiveelement such as a photodiode and converted into electrons.

SUMMARY

The embodiments herein relate to a device comprising a substrate havinga front side and a back-side that is exposed to incoming radiation, awaveguide comprising a nanowire disposed on the substrate and an imagesensing circuit disposed on the front side, wherein the nanowire isconfigured to be both a channel to transmit wavelengths of the incomingradiation up to a selective wavelength and an active element to detectthe wavelengths of the incoming radiation up to the selective wavelengthtransmitted through the nanowire.

In one illustrative embodiment, the nanowire is not transparent anddisposed within a cavity in the substrate, the front side is not exposedto the incoming radiation, and the image sensing circuit is on or withina layer on the front-side of the substrate.

In one illustrative embodiment, the device does not include a colorfilter nor infra-red filter.

In one illustrative embodiment, the nanowire comprises a semiconductor.

The device can further comprise, for example, a lens structure or anoptical coupler over the nanowire.

In one illustrative embodiment, the lens structure or the opticalcoupler is operably coupled to the nanowire.

The device can further comprise, for example, an anti-reflective layerdisposed on the substrate.

In one illustrative embodiment, the active element is configured to be aphotodiode, a charge storage capacitor, or combinations thereof.

In one illustrative embodiment, the device is an image sensor.

In one illustrative embodiment, the selective wavelength is a functionof the diameter of the nanowire.

The device can further comprise, for example, a vertical photogate.

In one illustrative embodiment, the nanowire is configured to convertenergy of the electromagnetic radiation transmitted through the nanowireand to generate electron hole-pairs (excitons).

In one illustrative embodiment, the nanowire comprises a pn or pinjunction that is configured to detect the excitons generated in thenanowire.

The device can further comprise, for example, an insulator layer aroundthe nanowire and a metal layer around the insulator layer to form acapacitor that is configured to collect the excitons generated in thenanowire and store charge in the capacitor.

The device can further comprise, for example, metal contacts thatconnect to the metal layer and nanowire to control and detect the chargestored in the capacitor.

The device can further comprise, for example, a cladding. In oneillustrative embodiment, the cladding is configured to be a channel totransmit the wavelengths of the electromagnetic radiation beam that donot transmit through the nanowire.

The device can further comprise, for example, a cladding.

In one illustrative embodiment, the cladding comprises a passivewaveguide.

The device can further comprise, for example, a peripheralphotosensitive element. In one illustrative embodiment, the peripheralphotosensitive element is operably coupled to the cladding.

In one illustrative embodiment, cladding comprises more than one layers.In one illustrative embodiment, the more than one layers have indices ofrefraction consecutively smaller than a index of refraction thenanowire.

In one illustrative embodiment, the peripheral photosensitive element islocated on or within a substrate.

In one illustrative embodiment, the lens structure or the opticalcoupler comprises a first opening and a second opening with the firstopening being larger than the second opening, and a connecting surfaceextending between the first and second openings.

In one illustrative embodiment, the connecting surface comprises areflective surface.

The device can further comprise, for example, a color or IR filter.

Another embodiment relates to a compound light detector comprising atleast two different devices, each device comprising a substrate having afront side and a back-side that is exposed to incoming radiation, awaveguide comprising a nanowire disposed on the substrate and an imagesensing circuit disposed on the front side, wherein the nanowire isconfigured to be both a channel to transmit wavelengths of the incomingradiation up to a selective wavelength and an active element to detectthe wavelengths of the incoming radiation up to the selective wavelengthtransmitted through the nanowire, and the compound light detector isconfigured to reconstruct a spectrum of wavelengths of anelectromagnetic radiation beam.

In one illustrative embodiment, the at least two different devices havenanowires having different diameters.

The compound light detector can further comprise, for example, acladding surrounding the nanowire and of one or more differentmaterials. In one illustrative embodiment, the cladding permitselectromagnetic radiation of wavelengths beyond the selective wavelengthto remains within the cladding and be transmitted to a peripheralphotosensitive element.

In one illustrative embodiment, a plurality of light detectors arearranged on a regular tessellation, a square lattice, an hexagonallattice, or in a different lattice arrangement.

In one illustrative embodiment, the spectrum of wavelengths compriseswavelengths of visible light, IR or combinations thereof.

In one illustrative embodiment, the first device comprises a core of adifferent diameter than that of the second device and the spectrum ofwavelengths comprises wavelengths of visible light, IR or combinationsthereof.

In one illustrative embodiment, the compound light detector isconfigured to resolve black and white or luminescence informationcontained in the electromagnetic radiation beam.

In one illustrative embodiment, the compound light detector isconfigured to detect energies of the electromagnetic radiation of fourdifferent ranges of wavelengths.

In one illustrative embodiment, the energies of the electromagneticradiation of the four different ranges of wavelengths are combined toconstruct red, green and blue colors.

In one illustrative embodiment, at least some of the at least one of thedevices does not include a color or infra-red filter.

Yet another embodiment relates to a waveguide comprising a substrate andat least one upstanding nanowire protruding from the substrate, apn-junction contributing to the formation of an active region to absorbthe light.

In one illustrative embodiment, a shell-like structure encloses thenanowire or portion thereof.

In one illustrative embodiment, the nanowire has a first effectiverefractive index, n_(w) and a material surrounding at least a portion ofthe nanowire to form a cladding having a second effective refractiveindex, n_(c), and the first refractive index is larger than the secondrefractive index, n_(w)>n_(c) configured to create waveguidingproperties of the waveguide.

In one illustrative embodiment, the waveguide forms a defined angle withthe substrate and the defined angle between nanowire and substrate isselected to create a vertical or close to vertical orientation.

In one illustrative embodiment, the waveguide is provided with at leastone cladding layer.

In one illustrative embodiment, the one cladding layer is an opticalcladding layer configured to enhance wave-guiding properties of thewaveguide.

In one illustrative embodiment, a plurality of cladding layers provide agraded refractive index towards a boundary of the waveguide to enhancewave-guiding properties of the waveguide.

In one illustrative embodiment, the cladding layer comprises a metal tocreate electrical connection, and/or reduce the cross talk between theadjacent pixels.

In one illustrative embodiment, a diameter of the waveguide is largerthan λ/2n_(w), wherein, λ is the wavelength of the confined light andn_(w) is the refractive index of the waveguide.

In one illustrative embodiment, the active region is arranged within thenanowire.

In one illustrative embodiment, the pn junction associated with theactive region is formed by doping the silicon nanowire.

In one illustrative embodiment, the nanowire is arranged to direct lightin downward direction towards the substrate.

The waveguide can further comprise, for example, a planar photodetectorand a plurality of nanowires arranged in an upstanding configuration onthe planar photodetector surface and in epitaxial connection with theplanar photodetector layer.

The foregoing summary is illustrative only and is not intended to be inany way limiting. In addition to the illustrative aspects, embodiments,and features described above, further aspects, embodiments, and featureswill become apparent by reference to the drawings and the followingdetailed description.

DESCRIPTION OF THE FIGURES

FIG. 1 shows an illustrative embodiment of a cross sectional view of aconventional front illumination sensor and a back-illuminated sensor.

FIG. 2 shows an illustrative embodiment of a cross-sectional view of aback-illuminated image sensor.

FIG. 3A shows an illustrative embodiment of a cross-sectional view of apixel structure with a backside waveguide structure, such as a nanowireand dual vertical photogates.

FIG. 3B shows an illustrative embodiment of a cross-sectional view of apixel structure with a backside nanowire and a vertical gate.

FIGS. 3C and 3D show illustrative embodiments of a cross-sectional viewof a waveguide structure, such as a nanowire, containingbackside-illuminated image sensor with nanowires located on the backsideof the image sensor.

FIGS. 4A-B shows illustrative embodiments of different back sideilluminated image sensors having photodiodes therein.

FIG. 4C shows an illustrative embodiment of a nanostructured waveguidewith dimensions therein.

FIG. 5 shows an illustrative embodiment of an array of nanowires withina single cavity of the image sensor of an embodiment.

FIG. 6 shows an illustrative embodiment of a schematic of a top view ofa device containing image pixels of the embodiments disclosed herein,each image pixel having two outputs representing the complementarycolors.

FIG. 7 shows an illustrative embodiment of an array of nanostructuredwaveguides showing 3 types of pixels (red, green, and blue in atessellation).

DETAILED DESCRIPTION

Symbols for elements illustrated in the figures are summarized in thefollowing table. The elements are described in more detail below.

Symbol Element VPG 1 (VP Gate 1) The first vertical photogate VPG 2 (VPGate 1) The second vertical photogate TX Gate Transfer gate FD Transferdrain RG Reset gate RD Reset drain Sub substrate VDD Positive transistorvoltage Vout Output voltage NW (nw) Nanowire de Dielectric layer PGphotogate I (i) Current n+, n− Semiconducting material with excessdonors, n+ is heavily doped, n− is lightly doped p+, p− Semiconductingmaterial with excess acceptors, p+ is heavily doped, p− is lightly doped

In the following detailed description, reference is made to theaccompanying drawings, which form a part hereof. In the drawings,similar symbols typically identify similar components, unless contextdictates otherwise. The illustrative embodiments described in thedetailed description, drawings, and claims are not meant to be limiting.Other embodiments may be utilized, and other changes may be made,without departing from the spirit or scope of the subject matterpresented here.

The term nanowire refers to a structure that has a thickness or diameterof the order of nanometers, for example, 100 nanometers or less and anunconstrained length. Nanowires can include metallic (e.g., Ni, Pt, Au),semiconducting (e.g., Si, Inp, Gan, etc.), and insulating (e.g., SiO₂,TiO₂) materials. Molecular nanowires are composed of repeating molecularunits either organic or inorganic. Nanowires can exhibit aspect ratios(length-to-width ratio) of 1000 or more. As such they can be referred toas 1-dimensional (1D) materials. Nanowires can have many interestingproperties that are not seen in bulk or 3-D materials. This is becauseelectrons in nanowires can be quantum confined laterally and thus occupyenergy levels that can be different from the traditional continuum ofenergy levels or bands found in bulk materials. As a result, nanowirescan have discrete values of electrical and optical conductance. Examplesof nanowires include inorganic molecular nanowires (Mo₆S_(9-x)I_(x),Li₂Mo₆Se₆), which can have a diameter of the range of few nanometers,and can be hundreds of micrometers long. Other important examples arebased on semiconductors such as Inp, Si, Gan, etc., dielectrics (e.g.SiO₂, TiO₂), or metals (e.g. Ni, Pt).

The term excitons refer to electron-hole pairs.

An active element is any type of circuit component with the ability toelectrically control electron and/or hole flow (electricity controllingelectricity or light, or vice versa). Components incapable ofcontrolling current by means of another electrical signal are calledpassive elements. Resistors, capacitors, inductors, transformers, andeven diodes are all considered passive elements. Active elements includein embodiments disclosed herein, but are not limited to, an activewaveguide, transistors, silicon-controlled rectifiers (SCRs), lightemitting diodes, and photodiodes.

A waveguide is a system or material designed to confine and directelectromagnetic radiation of selective wavelengths in a directiondetermined by its physical boundaries. Preferably, the selectivewavelength is a function of the diameter of the waveguide. An activewaveguide is a waveguide that has the ability to electrically controlelectron and/or hole flow (electricity controlling electricity or light,or vice versa). This ability of the active waveguide, for example, isone reason why the active waveguide can be considered to be “active” andwithin the genus of an active element.

An optical pipe is an element to confine and transmit an electromagneticradiation that impinges on the optical pipe. The optical pipe caninclude a core and a cladding. The core can be a nanowire. The opticalpipe can be configured to separate wavelengths of an electromagneticradiation beam incident on the optical pipe at a selective wavelengththrough the core and the cladding, wherein the core is configured to beboth a channel to transmit the wavelengths up to the selectivewavelength and an active element to detect the wavelengths up to theselective wavelength transmitted through the core. A core and a claddingare generally complimentary components of the optical pipe and areconfigured to separate wavelengths of an electromagnetic radiation beamincident on the optical pipe at a selective wavelength through the coreand cladding.

A photogate is a gate used in an optoelectronic device. Typically thephotogate comprises a metal-oxide-semiconductor (MOS) structure. Thephotogate accumulates photo generated charges during the integrationtime of the photodiode and controls the transfer of charges whenintegration is over. A photodiode comprises a pn junction, however, aphotogate can be placed on any type semiconductor material. A verticalphotogate is a new structure. Normally, photogates are placed on aplanar photodiode devices. In a nanowire device, however, the photogatecan be formed in a vertical direction. That is, standing up covering thelateral surface of the nanowire.

A transfer gate is a gate of a switch transistor used in a pixel. Thetransfer gate's role is to transfer the charges from one side of adevice to another. In some embodiments, the transfer gate is used totransfer the charges from the photodiode to the sensing node (orfloating diffusion). A reset gate is a gate used for resetting a device.In some embodiments, the device is the sense node which is formed by ann+ region. Reset means to restore to original voltage level set by acertain voltage. In some embodiments, the voltage of the reset drain(RD) is the voltage used as a reset level.

A floating capacitor is a capacitor which floats relative to thesubstrate. Normally a capacitor consists of two electrodes and aninsulator between them. Typically, both of the electrodes are connectedto other device or signal lines. In a pixel, often one of the electrodesmay not be connected to a structure. This unconnected, isolated areaforms the floating capacitor with respect to the substrate. In otherwords, the isolated area comprises one electrode which is floating. Thesubstrate comprises the other electrode which is normally connected tothe ground. A depletion region between them comprises the insulator.

A global connection is a connection in which many branch nodes areconnected to a single line electrically so that one signal line cancontrol the multiple branched devices at the same time. Asource-follower amplifier is a common drain transistor amplifier. Thatis, a transistor amplifier whose source node follows the same phase asthe gate node. The gate terminal of the transistor serves as the input,the source is the output, and the drain is common to both (input andoutput). A shallow layer is a doped layer that is physically locatednear the surface of the substrate. For example, a p+ layer may beintentionally formed shallow by using low energy when ion implantationis used. Normally the junction depth of a shallow layer is 0.01 μm˜0.2μm. In contrast, a deep layer may be as deep as a few μm to tens of μm.

An intrinsic semiconductor, also called an undoped semiconductor ori-type semiconductor, is a pure semiconductor without any significantdopant species present. The number of charge carriers is thereforedetermined by the properties of the material itself instead of theamount of impurities. In intrinsic semiconductors, the number of excitedelectrons and the number of holes are equal: n=p. The conductivity ofintrinsic semiconductors can be due to crystal defects or to thermalexcitation. In an intrinsic semiconductor, the number of electrons inthe conduction band is equal to the number of holes in the valence band.

Shallow trench isolation (STI), also known as ‘Box Isolation Technique’,is an integrated circuit feature which prevents electrical currentleakage between adjacent semiconductor device components. STI isgenerally used on CMOS process technology nodes of 250 nanometers andsmaller. Older CMOS technologies and non-MOS technologies commonly useisolation based on LOCal Oxidation of Silicon (LOCOS). STI is typicallycreated early during the semiconductor device fabrication process,before transistors are formed. Steps of the STI process include etchinga pattern of trenches in the silicon, depositing one or more dielectricmaterials (such as silicon dioxide) to fill the trenches, and removingthe excess dielectric using a technique such as chemical-mechanicalplanarization.

In yet other embodiments, a plurality of nanowires are arranged on aregular tessellation.

In yet other embodiments, a coupler that may take the shape of a microlens efficiently can be located on the optical pipe to collect and guidethe electromagnetic radiation into the optical pipe. The optical pipecan comprise of a nanowire core of refractive index n₁ surrounded by acladding of refractive index n₂.

In the configuration of the optical pipe of the embodiments of thisinvention, it is possible to eliminate pigmented color filters thatabsorb about ⅔ of the light that impinges on the image sensor. The corefunctions as an active waveguide and the cladding of the optical pipecan function as a passive waveguide with a peripheral photosensitiveelement surrounding the core to detect the electromagnetic radiationtransmitted through the passive waveguide of the cladding. Passivewaveguides do not absorb light like color filters, but can be designedto selectively transmit selected wavelengths.

A waveguide, whether passive or active, has a cutoff wavelength that isthe lowest frequency that the waveguide can propagate. The diameter ofthe semiconductor nanowire of the core serves as the control parameterfor the cutoff wavelength of the nanowire.

The nanowire can also serve as a photodiode by absorbing the confinedlight and generating electron-hole pairs (excitons).

Excitons so generated can be detected by using at least one of thefollowing two designs: (1) A core is made up of a three layers,semiconductor, insulator and metal thus forming a capacitor to collectthe charge generated by the light induced carriers. Contacts are made tothe metal and to the semiconductor to control and detect the storedcharge. The core can be formed by growing a nanowire and depositing aninsulator layer and a metal layer surrounding the nanowire. (2) A corehaving a pin junction that induces a potential gradient in the corewire. The pin junction in the core can be formed by growing a nanowireand doping the nanowire core while it is growing as a pin junction andcontacting it at the appropriate points using the various metal layersthat are part of any device. ITO also can be used as a electricallyconductive material.

The photosensitive elements of the embodiments typically comprise aphotodiode, although not limited to only a photodiode. Typically, thephotodiode is doped to a concentration from about 1×10₁₆ to about 1×10₁₈dopant atoms per cubic centimeter, with an appropriate dopant.

The image sensor can have different stacking layers. The stacking layerscan comprise dielectric material-containing and metal-containing layers.The dielectric materials include as but not limited to oxides, nitridesand oxynitrides of silicon having a dielectric constant from about 4 toabout 20, measured in vacuum. Also included, and also not limiting, aregenerally higher dielectric constant gate dielectric materials having adielectric constant from about 20 to at least about 100. These higherdielectric constant dielectric materials may include, but are notlimited to hafnium oxides, hafnium silicates, titanium oxides,barium-strontium titanates (BSTs) and lead-zirconate titanates (PZTs).

The dielectric material-containing layers may be formed using methodsappropriate to their materials of composition. Non-limiting examples ofmethods include thermal or plasma oxidation or nitridation methods,chemical vapor deposition methods (including atomic layer chemical vapordeposition methods) and physical vapor deposition methods.

The metal-containing layers can function as electrodes. Non-limitingexamples include certain metals, metal alloys, metal silicides and metalnitrides, as well as doped polysilicon materials (i.e., having a dopantconcentration from about 1×10₁₈ to about 1×10₂₂ dopant atoms per cubiccentimeter) and polycide (i.e., doped polysilicon/metal silicide stack)materials. The metal-containing layers may be deposited using any ofseveral methods. Non-limiting examples include chemical vapor depositionmethods (also including atomic layer chemical vapor deposition methods)and physical vapor deposition methods. The metal-containing layers cancomprise a doped polysilicon material (having a thickness typically inthe range 1000 to 1500 Angstroms.

The dielectric and metallization stack layer comprises a series ofdielectric passivation layers. Also embedded within the stack layer areinterconnected metallization layers. Components for the pair ofinterconnected metallization layers include, but are not limited tocontact studs, interconnection layers, interconnection studs.

The individual metallization interconnection studs and metallizationinterconnection layers that can be used within the interconnectedmetallization layers may comprise any of several metallization materialsthat are conventional in the semiconductor fabrication art. Non-limitingexamples include certain metals, metal alloys, metal nitrides and metalsilicides. Most common are aluminum metallization materials and coppermetallization materials, either of which often includes a barriermetallization material, as discussed in greater detail below. Types ofmetallization materials may differ as a function of size and locationwithin a semiconductor structure. Smaller and lower-lying metallizationfeatures typically comprise copper containing conductor materials.Larger and upper-lying metallization features typically comprisealuminum containing conductor materials.

The series of dielectric passivation layers may also comprise any ofseveral dielectric materials that are conventional in the semiconductorfabrication art. Included are generally higher dielectric constantdielectric materials having a dielectric constant from 4 to about 20.Non-limiting examples that are included within this group are oxides,nitrides and oxynitrides of silicon. For example, the series ofdielectric layers may also comprise generally lower dielectric constantdielectric materials having a dielectric constant from about 2 to about4. Included but not limiting within this group are hydrogels such assilicon hydrogel, aerogels like silicon Al, or carbon aerogel,silsesquioxane spin-on-glass dielectric materials, fluorinated glassmaterials, organic polymer materials, and other low dielectric constantmaterials such as doped silicon dioxide (e.g., doped with carbon,fluorine), and porous silicon dioxide.

The dielectric and metallization stack layer can comprise interconnectedmetallization layers and discrete metallization layers comprising atleast one of copper metallization materials and aluminum metallizationmaterials. The dielectric and metallization stack layer also comprisesdielectric passivation layers that also comprise at least one of thegenerally lower dielectric constant dielectric materials disclosedabove. The dielectric and metallization stack layer can have an overallthickness from about 1 to about 4 microns. It may comprise from about 2to about 4 discrete horizontal dielectric and metallization componentlayers within a stack.

The layers of the stack layer can be patterned to form patterneddielectric and metallization stack layer using methods and materialsthat are conventional in the semiconductor fabrication art, andappropriate to the materials from which are formed the series ofdielectric passivation layers. The dielectric and metallization stacklayer may not be patterned at a location that includes a metallizationfeature located completely therein. The dielectric and metallizationstack layer may be patterned using wet chemical etch methods, dry plasmaetch methods or aggregate methods thereof. Dry plasma etch methods aswell as e-beam etching if the dimension needs to be small, are generallypreferred insofar as they provide enhanced sidewall profile control whenforming the series of patterned dielectric and metallization stacklayer.

A planarizing layer may comprise any of several optically transparentplanarizing materials. Non-limiting examples include spin-on-glassplanarizing materials and organic polymer planarizing materials. Theplanarizing layer can extend above the optical pipe such that theplanarizing layer can have a thickness sufficient to at least planarizethe opening of the optical pipe, thus providing a planar surface forfabrication of additional structures within the CMOS image sensor. Theplanarizing layer can be patterned to form the patterned planarizinglayer.

Optionally, there can be a series of color filter layers located uponthe patterned planarizing layer. The series of color filter layers, ifpresent, would typically include either the primary colors of red, greenand blue, or the complementary colors of yellow, cyan and magenta. Theseries of color filter layers would typically comprise a series of dyedor pigmented patterned photoresist layers that are intrinsically imagedto form the series of color filter layers. Alternatively, the series ofcolor filter layers may comprise dyed or pigmented organic polymermaterials that are otherwise optically transparent, but extrinsicallyimaged while using an appropriate mask layer. Alternative color filtermaterials may also be used. The filter can also be filter for a blackand white, or IR sensors wherein the filter cuts off visible and pass IRpredominantly.

The spacer layer can be one or more layers made of any material thatphysically, but not optically, separates the stacking layers from amicro lens on the top of the optical pipe near the incidentelectromagnetic radiation beam receiving end of the image sensor. Thefunction of the micro lens or in more general terms is to be a coupler,i.e., to couple the incident electromagnetic radiation beam into theoptical pipe. If one were to choose a micro lens as the coupler in thisembodiment, its distance from the optical pipe would be much shorterthan to the photosensitive element, so the constraints on its curvatureare much less stringent, thereby making it implementable with existingfabrication technology. The spacer layer can be formed of a dielectricspacer material or a laminate of dielectric spacer materials, althoughspacer layers formed of conductive materials are also known. Oxides,nitrides and oxynitrides of silicon are commonly used as dielectricspacer materials. Oxides, nitrides and oxynitrides of other elementssuch as ITO (Indium tin oxide) are not excluded. The dielectric spacermaterials may be deposited using methods analogous, equivalent oridentical to the methods described above. The spacer layer can be formedusing a blanket layer deposition and etchback method that provides thespacer layer with the characteristic inward pointed shape.

The micro lens may comprise any of several optically transparent lensmaterials that are known in the art. Non-limiting examples includeoptically transparent inorganic materials, optically transparent organicmaterials and optically transparent composite materials. Most common arethe optically transparent organic materials. Typically the lens layerscan be formed incident to patterning and reflow of an organic polymermaterial that has a glass transition temperature lower than the seriesof color filter layers, if present, or the patterned planarizing layer.

In the optical pipe, the high index material in the core can, forexample, be silicon nitride having a refractive index of about 2.0. Thelower index cladding layer material can, for example, be a glass, forexample a material selected from Table i, having a refractive indexabout 1.5. The core can be Silicon having refractive index in the range5-6, and the cladding can be silicon oxide having a refractive index ofabout 1.5.

In the optical pipe, the high index material in the core can, besurrounded by a cladding having two or more cladding have differentmaterials of consecutively lesser index of refraction. For example, ifsilicon is the material of the core, a first layer of silicon nitridecan be used, followed by another layer of silicon oxides. In thisconfiguration, the indices are reduced from 5-6 in the core to about 2in the first layer and then to about 1.5 in the second cladding layer.

In this embodiment, the two or more concentric dielectric layers performa light guiding function. Thus, one aspect of this embodiment is theabsence of a metal layer. In another aspect, the successive concentricdielectric layers of the two or more concentric dielectric layers have alower index of refraction with increasing radius. That is, concentricdielectric layers with a larger radius have a lower index of refractionthan concentric dielectric layers having a smaller radius. In anotheraspect, adjacent concentric dielectric layers have alternating higherand lower indexes of refraction.

In one embodiment, the waveguiding nanowire structure includes a highrefractive index core with one or more surrounding cladding withrefractive indexes less than that of the core. The structure has eithera circular symmetry, or close to being of circular symmetry. Thematerials of the different members of the nanostructured wire are suchthat the nanowire will have good waveguiding properties with respect tothe surrounding materials, i.e. the refractive index of the material inthe nanowire should be larger than the refractive indices of thesurrounding materials. If the nanowire has a first refracting index,n.sub.w, the material surrounding the nanowire typically cover one ormore layer graded refractive index, for example, n₃<n₂<n₁<n_(w).

TABLE I Typical Material Index of Refraction Micro Lens (Polymer) 1.583Spacer 1.512 Color Filter 1.541 Planarization 1.512 PESiN 2.00 PESiO1.46 SiO 1.46In Table I, PESin refers to plasma enhanced Sin and PESiO refers toplasma enhanced SiO.

The shape of the optical pipe can be different for differentembodiments. In one configuration, the optical pipe can be cylindrical,that is, the diameter of the pipe remains the substantially the samethroughout the length of the optical pipe. In another configuration, theoptical pipe can be conical, where the upper diameter of the crosssectional area of the optical pipe can be greater or smaller than thelower diameter of the cross sectional area of the optical pipe. Theterms “upper” and “lower” refer to the ends of the optical pipe locatedcloser to the incident electromagnetic radiation beam receiving andexiting ends of the image sensor. Other shapes include a stack ofconical sections.

Table I lists several different glasses and their refractive indices.These glasses can be used for the manufacture of the optical pipe suchthat refractive index of the core is higher than that of the cladding.The image sensors of the embodiments can be fabricated using differenttransparent glasses having different refractive indices without the useof pigmented color filters.

By nesting optical pipes that function as waveguides and using a microlens coupler, an array of image sensors can be configured to obtaincomplementary colors having wavelengths of electromagnetic radiationseparated at a cutoff wavelength in the core and cladding of eachoptical pipe of every image sensor. The complementary colors aregenerally two colors which when mixed in the proper proportion produce aneutral color (grey), white, or black. This configuration also enablesthe capture and guiding of most of the electromagnetic radiationincident beam impinging on the micro lens to the photosensitive elements(i.e., photodiodes) located at the lower end of the optical pipe. Twoadjacent or substantially adjacent image sensors with different colorcomplementary separation can provide complete information to reconstructa full color scene according to embodiments described herein. Thistechnology of embodiments disclosed herein can further supplant pigmentbased color reconstruction for image sensing which suffers from theinefficiency of discarding (through absorption) the non-selected colorfor each pixel.

Each physical pixel of a device containing an image sensor of theembodiments disclosed herein can have two outputs representing thecomplementary colors, e.g., cyan designated as output type 1 and yellowdesignated as output type 2. These outputs would be arranged intessellations as follows:

1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 . . . 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 .. . 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 . . . . . . . . . . . . . . . . . .. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

Each physical pixel can have complete luminance information obtained bycombining its two complementary outputs. The two complementary outputscan be measured by the photodiode in the optical pipe and by one or morephotodiodes in the substrate. As a result, the same image sensor can beused either as a full resolution black and white or full color sensor.

In the embodiments of the image sensors disclosed herein, the fullspectrum of wavelengths of the incident electromagnetic radiation beam(e.g., the full color information of the incident light) can be obtainedby the appropriate combination of two adjacent pixels eitherhorizontally or vertically as opposed to 4 pixels for the conventionalBayer pattern.

Depending on the minimum transistor sizes, each pixel containing animage sensor of the embodiments disclosed herein can be as small as 1micron or less in pitch and yet have sufficient sensitivity. This canopen the way for contact imaging of small structures such as biologicalsystems.

The embodiments, which include a plurality of embodiments of an imagesensor, as well as methods for fabrication thereof, will be described infurther detail within the context of the following description. Thedescription is further understood within the context of the drawingsdescribed above. The drawings are for illustrative purposes and as suchare not necessarily drawn to scale.

An embodiment of a compound pixel comprises a system of two pixels, eachhaving a core of a different diameter such that cores have diametersd.sub.1 and d.sub.2 for directing light of different wavelengths (forexample, λ_(G), λ_(B) or λ_(R)). The two cores can also serve asphotodiodes to capture light of wavelengths λ_(B), λ_(G), or λ_(R). Thecladdings of the two image sensors serve for transmitting the light ofwave length λ_(w-B), λ_(w-G) or λ_(w-R). The light of wave lengthλ_(w-B), λ_(w-G) or λ_(w-R) transmitted through the cladding is detectedby the peripheral photosensitive elements surrounding the cores. Notethat (w) refers to the spectrum of white light. Signals from the 4photodiodes (two located in the cores and two located in or on thesubstrate surrounding the core) in the compound pixel are used toconstruct color.

The embodiments include a nanostructured photodiode (PD) according tothe embodiments comprise a substrate and an upstanding nanowireprotruding from the substrate.

A pn-junction giving an active region to detect light may be presentwithin the structure. The nanowire, a part of the nanowire, or astructure in connection with the nanowire, forms a waveguide directingand detecting at least a portion of the light that impinges on thedevice. In addition the waveguide doubles up as spectral filter thatenables the determination of the color range of the impinging light.

A nanostructured PD according to the embodiments comprises of anupstanding nanowire. For the purpose of this application an upstandingnanowire should be interpreted as a nanowire protruding from thesubstrate in some angle, the upstanding nanowire for example being grownepitaxially from the substrate, for example, by as vapor-liquid-solid(VLS) grown nanowires. The angle with the substrate will typically be aresult of the materials in the substrate and the nanowire, the surfaceof the substrate and growth conditions. By controlling these parametersit is possible to produce nanowires pointing in only one direction, forexample vertical, or in a limited set of directions. Semiconductornanowires can be grown normal to the substrate, and silicon nanowirescan be grown in the [111] directions with substrate in the (111) crystalplan. Nanowires and substrates of zinc-blende and diamond semiconductorscomposed of elements from columns IIi, V and IV of the periodic table,such nanowires can be grown in the directions and then be grown in thenormal direction to any {111} substrate surface. Other directions givenas the angle between normal to the surface and the axial direction ofthe nanowire include 70.53° {111}, 54.73° {100}, and 35.27° and 90°,both to {110}. Thus, the nanowires define one, or a limited set, ofdirections.

According to the embodiments, a part of the nanowire or structure formedfrom the nanowire can be used as a waveguide directing and confining atleast a portion of the light impinging on the nanostructured PD in adirection given by the upstanding nanowire. The waveguidingnanostructured PD structure can include a high refractive index corewith one or more surrounding cladding(s) with refractive indices lessthan that of the core. The structure can be either circular symmetricalor close to being circular symmetrical. Light waveguiding in circularsymmetrical structures are well-known for fiber-optic applications andmany parallels can be made to the area of rare-earth-doped fiber opticdevices. However, one difference is that fiber amplifier are opticallypumped to enhance the light guided through them while the describednanostructured PD can be seen as an efficient light to electricityconverter. One well-known figure of merit is the so called NumericalAperture, NA. The NA determines the angle of light captured by thewaveguide. The NA and the angle of the captured light are importantparameters in the optimization of a new PD structure.

For a PD operating in IR and above IR, using GaAs can be good, but for aPD operating in the visible light region, silicon would be preferable.For example to create circuits, Si and doped Si materials arepreferable. Similarly, for a PD working in the visible range of light,one would prefer to use Si.

In one embodiment, the typical values of the refractive indexes forIII-V semiconductor core material are in the range from 2.5 to 5.5 whencombined with glass type of cladding material (such as SiO₂ or Si₃N₄)having refractive indexes ranging from 1.4 to 2.3. A larger angle ofcapture means light impinging at larger angles can be coupled into thewaveguide for better capture efficiency.

One consideration in the optimization of light capture is to provide acoupler into the nanowire structure to optimize light capture into thestructure. In general, it would be preferred to have the NA be highestwhere the light collection takes place. This would maximize the lightcaptured and guided into the PD.

A nanostructured PD according to the embodiments can comprise asubstrate and a nanowire epitaxially grown from the substrate in andefined angle θ. A portion of or all of the nanowire can be arranged toact as a waveguiding portion directing at least a portion of theimpinging light in a direction given by the elongated direction of thenanowire, and will be referred to as a waveguide. In one possibleimplementatioin, a pn-junction necessary for the diode functionality canbe formed by varying the doping of the wire along its length while it isgrowing. Two contacts can be provided on the nanowire for example one ontop or in a wrapping configuration on the circumferential outer surfaceand the other contact can be provided in the substrate. The substrateand part of the upstanding structure may be covered by a cover layer,for example as a thin film as illustrated or as material filling thespace surrounding the nanostructured PD.

The nanowire can have a diameter in the order of 50 nm to 500 nm, Thelength of the nanowire can be of the order of 1 to 10 μm. The length ofthe nanowire is preferably of the order of 4-10 μm, providing enoughvolume for creating an active pn junction. The pn-junction results in anactive region arranged in the nanowire. Impinging photons in thenanowire are converted to electron hole pairs and in one implementationare subsequently separated by the electric fields generated by the PNjunction along the length of the nanowire. The materials of thedifferent members of the nanostructured PD are chosen so that thenanowire will have good waveguiding properties vis-a-vis the surroundingmaterials, i.e. the refractive index of the material in the nanowireshould preferably be larger than the refractive indices of thesurrounding materials.

In addition, the nanowire may be provided with one or more layers. Afirst layer, may be introduced to improve the surface properties (i.e.,reduce charge leakage) of the nanowire. Further layers, for example anoptical layer may be introduced specifically to improve the waveguidingproperties of the nanowire, in manners similar to what is wellestablished in the area of fiber optics. The optical layer typically hasa refractive index in between the refractive index of the nanowire andthe surrounding cladding region material. Alternatively the intermediatelayer has a graded refractive index, which has been shown to improvelight transmission in certain cases. If an optical layer is utilized therefractive index of the nanowire, n_(w), should define an effectiverefractive index for both the nanowire and the layers.

The ability to grow nanowires with well-defined diameters, as describedabove and exemplified below, can be used to optimize the waveguidingproperties of the nanowire or at least the waveguide with regards to thewavelength of the light confined and converted by the nanostructured PD.The diameter of the nanowire can be chosen so as to have a favorablecorrespondence to the wavelength of the desired light. Preferably thedimensions of the nanowire are such that a uniform optical cavity,optimized for the specific wavelength of the produced light, is providedalong the nanowire. The core nanowire must be sufficiently wide tocapture the desired light. A rule of thumb would be that the diametermust be larger than λ/2n_(w), wherein λ is the wavelength of the desiredlight and n_(w) is the refractive index of the nanowire. As an example adiameter of about 60 nm may be appropriate to confine blue light onlyand one 80 nm may be appropriate for to confine both blue and greenlight only in a silicon nanowire.

In the infra-red and near infra-red a diameter above 100 nm would besufficient. An approximate preferred upper limit for the diameter of thenanowire is given by the growth constraints, and can be of the order of500 nm. The length of the nanowire is typically and preferably of theorder of 1-10 μm, providing enough volume for the light conversionregion.

A reflective layer can be in one embodiment, provided on the substrateand extending under the wire. The purpose of the reflective layer is toreflect light that is guided by the wire but has not been absorbed andconverted to carriers in the nanostructured PD. The reflective layer ispreferably provided in the form of a multilayered structure comprisingrepeated layers of silicates for example, or as a metal film. If thediameter of the nanowire is sufficiently smaller than the wavelength ofthe light a large fraction of the directed light mode will extendoutside the waveguide, enabling efficient reflection by a reflectivelayer surrounding the narrow the nanowire waveguide

An alternative approach to getting a reflection in the lower end of thewaveguide core can be to arrange a reflective layer in the substrateunderneath the nanowire. Yet another alternative can be to introducereflective means within the waveguide. Such reflective means can be amultilayered structure provided during the growth process of thenanowire, the multilayered structure comprising repeated layers of forexample SiN_(x)/SiO_(x) (dielectric).

To form the pn-junction necessary for light detection at least part ofthe nanostructure is preferably doped. This can be done by eitherchanging dopants during the growth of the nanowire or using a radialshallow implant method on the nanowire once it is grown.

Considering systems where nanowire growth is locally enhanced by asubstance, as vapor-liquid-solid (VLS) grown nanowires, the ability tochange between radial and axial growth by altering growth conditionsenables the procedure (nanowire growth, mask formation, and subsequentselective growth) to be repeated to form nanowire/3D-sequences of higherorder. For systems where nanowire axial growth and selective radialgrowth are not distinguished by separate growth conditions it may bebetter to first grow the nanowire along the length and by differentselective growth steps grow different types of 3D regions.

A fabrication method according to the embodiments of a light detectingpn-diode/array with active nanowire region(s) formed of Si, comprisesthe steps of:

1. Defining of local catalyst/catalysts on a silicon substrate bylithography. 2. Growing silicon nanowire from local catalyst. The growthparameters adjusted for catalytic wire growth. 3. Radial growing ofother semiconductor, passivation, thin insulator or metal concentriclayer around the nanowire (cladding layer). 4. Forming contacts on thePD nanowire and to the substrate and to other metal layers in a CMOScircuit.

The growth process can be varied in known ways, for example, to includeheterostructures in the nanowires, provide reflective layers etc.

Depending on the intended use of the nanostructured PD, availability ofsuitable production processes, costs for materials etc., a wide range ofmaterials can be used for the different parts of the structure. Inaddition, the nanowire based technology allows for defect freecombinations of materials that otherwise would be impossible to combine.The III-V semiconductors are of particular interest due to theirproperties facilitating high speed and low power electronics. Suitablematerials for the substrate include, but is not limited to: Si, GaAs,GaP, GaP:Zn, GaAs, InAs, InP, GaN, Al.sub.2O.sub.3, SiC, Ge, GaSb, ZnO,InSb, SOI (silicon-on-insulator), CdS, ZnSe, CdTe. Suitable materialsfor the nanowire 110 include, but is not limited to: Si, GaAs (p), InAs,Ge, ZnO, InN, GaInN, GaN AlGaInN, BN, InP, InAsP, GaInP, InGaP:Si,InGaP:Zn, GaInAs, AlInP, GaAlInP, GaAlInAsP, GaInSb, InSb. Possibledonor dopants for e.g. GaP, Te, Se, S, etc, and acceptor dopants for thesame material are Zn, Fe, Mg, Be, Cd, etc. It should be noted that thenanowire technology makes it possible to use nitrides such as SiN, GaN,InN and AlN, which facilitates fabrication of PDs detecting light inwavelength regions not easily accessible by conventional techniques.Other combinations of particular commercial interest include, but is notlimited to GaAs, GaInP, GaAlInP, GaP systems. Typical doping levelsrange from 10.sup.18 to 10.sup.20 per cubic centimeter. A person skilledin the art is thoroughly familiar with these and other materials andrealizes that other materials and material combinations are possible.

The appropriateness of low resistivity contact materials are dependenton the material to be deposited on, but metal, metal alloys as well asnon-metal compounds like Al, Al—Si, TiSi2, Tin, W, ITO (InSnO), MoSi2,PtSi, CoSi2, WSi2, In, AuGa, AuSb, AuGe, PeGe, Ti/Pt/Au, Ti/Al/Ti/Au,Pd/Au, etc. and combinations of e.g. metal and ITO can be used.

The substrate can be an integral part of the device, since it alsocontains the photodiodes necessary to detect light that has not beenconfined to the nanowire. The substrate in addition also containsstandard CMOS circuits to control the biasing, amplification and readoutof the PD as well as any other CMOS circuit deemed necessary and useful.The substrate include substrates having active devices therein. Suitablematerials for the substrates include silicon and silicon-containingmaterials. Generally, each sensor element of the embodiments include ananostructured PD structure comprise a nanowire, a cladding enclosing atleast a portion of the nanowire, a coupler and two contacts.

The fabrication of the nanostructured PDs on silicon is possible to thedegree that the nanowires are uniformly aligned in the (111) directionnormal to the substrates and essentially no nanowires are grown in thethree declined (111) directions that also extends out from thesubstrate. The well aligned growth of III-V nanowires in predefinedarray structures on silicon substrates, is preferred for successfullarge scale fabrication of optical devices, as well as most otherapplications.

PD devices build on silicon nanowires are of high commercial interestdue to their ability to detect light of selected wavelengths notpossible with other material combinations. In addition they allow thedesign of a compound photodiode: that allows the detection of most ofthe light that impinges on an image sensor.

EXAMPLES Example 1

An example of a back-side illuminated image sensor having a fullyprocessed wafer containing a substrate photodiode but without thenanowires on the back-side of the substrate is shown in FIG. 2.

FIG. 3A shows an embodiment showing a nanowire on the back-side of afully processed wafer containing a substrate photodiode (many of thesenanowires would be constructed in a close packed manner). In anembodiment such as that shown in FIG. 3A, the nanowire photodiodesensors can include one or more vertical photogates. Vertical photogateshave many advantages. They can modify and control the potential profilein the semiconductor without using a complicated ion implantationprocess. The conventional photogate pixel suffers from poor quantumefficiency and poor blue response. The conventional photogate isnormally made of polysilicon which absorbs short wavelengths near bluelight, thus reducing the blue light reaching the photodiode. Further,the conventional photogate pixel is placed on top of the photodiode andmay block the light path. The vertical photogate (VPG) structure, incontrast, does not block the light path. This is because the verticalphotogate (VPG) does not lie laterally across the photodiode to controlthe potential profile in the semiconductor.

Additionally, as the pixel size of image sensors scale down, theaperture size of the image sensor becomes comparable to the wavelength.For a conventional planar type photodiode, this results in a poorquantum efficiency (QE). The combination of a VPG structure with ananowire sensor, however, allows for an ultra small pixel with goodquantum efficiency.

In one embodiment such as that shown in FIG. 3A, a nanowire pixel canhave a dual vertical photogate structure. This embodiment can includetwo photodiodes, a nanowire photodiode and a substrate photodiode. Thisembodiment also includes two vertical photogates (Vp Gate 1, Vp Gate 2),a transfer gate (TX) and a reset gate (RG). Preferably, both of thephotodiodes are lightly doped. This is because a lightly doped regioncan be easily depleted with a low bias voltage. As illustrated, both ofthe photodiodes are (n−). Alternatively, however, the nanowire pixel canbe configured so that both photodiodes are (p−).

The surface region of the substrate photodiode can be prone to defectsdue to process induced damage that is produced during fabrication and tolattice stress associated with the growth of the nanowire. These defectsserve as a source for dark current. To suppress the dark current at thesurface of the (n−) photodiode, preferably, a (p+) region is fabricatedon top of the n− photodiode in the substrate.

Preferably, the substrate is connected to ground, that is, zero voltage.In this embodiment the reset gate is preferably doped (n+) and ispositively biased. When the transfer gate TX and reset gates are on, the(n−) region in the substrate becomes positively biased. This results inthe (n−) region becoming depleted due to the reverse bias conditionbetween the p doped substrate and (n−) region. When the transfer gate TXand reset gate RG are off, the (n−) region retains its positive bias,forming a floating capacitor with respect to the p-sub region.

The first vertical photogate Vp Gate 1 can be configured to control thepotential in the nanowire so that a potential difference can be formedbetween the nanowire photodiode and the substrate photodiode. In thisway, electrons in the nanowire can drift quickly to (n−) region of thesubstrate during the readout.

The second photogate Vp Gate-2 can be an on/off switch. This switch canbe configured to separate the signal charges generated in the nanowirefrom the signal charges integrated in the substrate photodiode. Photocharges are integrated in both the nanowire and substrate photodiodes atthe same time, but integrated in separate potential wells because theoff-state of the second photogate Vp Gate-2 forms a potential barrierbetween them. In this manner the nanowire and substrate photodiodes donot get mixed together.

The nanowire photosensor of the present embodiment uses a two stepprocess to read out the signals separately between the nanowire andsubstrate photodiodes. In the first step, the signal charges in thesubstrate photodiode are read out. Then, the (n−) region in thesubstrate is depleted. In the second step, the second photogate Vp Gate2 can be first turned on. Then, signal charges in the nanowire are readout.

In a “snapshot” operation, preferably all of the second photogates VpGate 2 are turned on or off at the same time. The same can be true forthe transfer gate TX. To accomplish this, the second photogates Vp Gate2 are all connected with a global connection. Further, all the transfergates TX are connected with a second global connection.

Generally, global operation of the reset gate RG should generally beavoided for practical reasons. In pixel arrays, it is a common practiceto globally reset the array row by row. That is, it is, an entire arrayof pixels is generally not rested at the same time. If snapshotoperation is not used, individual pixel operation is possible. In thiscase, it is not necessary to have global connections.

To make the back-side illuminated image sensor of FIG. 3A, the wafer isthinned by removing silicon over the area containing the photodiodearray. For example, a doped p-substrate (p-sub) of FIG. 3A can be thethinned to a thickness between 3 and 50 microns, more preferably,between 6 and 20 microns. The substrate photodiode can now get all ofits light from the back-side and not from the side where all the metallines are as in conventional image sensors.

The nanowire can be formed at the backside of the doped (p−) substrateshown in FIG. 3A. At the front side, there can be a buffer amplifier andan (n−) diode with a (p+) layer on it as shown in FIG. 3A. The purposeof having (p+) at both sides of the substrate is to suppress the darkcurrent. A buried p-layer can be placed underneath the (n+) diffusionlayer to block the incoming charge flow from the backside and deflectthe charges toward the (n−) layer. Preferably, doping of the buriedp-layer is higher than that of the doped p-substrate, but not as high asthat of the p+ layer. The front side photodiode is not for photoabsorption, but rather for collecting the charges coming from thebackside p-substrate where photo absorption takes place. The nanowirecan have an oxide layer (cladding layer) surrounding the nanowire andtwo vertical photogates, one for the switch and the other forcontrolling the potential in the nanowire.

Typically, in the embodiment of FIG. 3A, it would take a two-stepprocess to read out the signal charges separately from at least some ofthe photo diodes. The first step would be to read out the charges fromthe p-sub diode. Immediately after this, by turning on the Vp gate-1,the charges from the nanowire would be read out.

Preferably, the embodiment of FIG. 3A should have a shallow p+ layerwith a hole in the center so that the p+ layer may not block thecarriers coming from the back-side nanowire. Also, preferably at thefront side there should be the N-well or lowly doped n-layer underneaththe shallow (p+) layer. The lowly doped N-well can be depleted easily.If (p+) and (n+) layers were to meet together, there can be a breakdownat low voltage similar to that of a Zener diode.

The embodiments relate to growing an array of nanowires (Si, or otherIII-V compounds) vertically in predetermined areas to serve as lightdetecting or light emitting devices. Such a structures may require othersurrounding passive or active layers that may serve important purposessuch as light channeling (as described in previous patent applications),electrical contacts and the like.

FIG. 3B shows another embodiment of a back-side illuminated imagesensor. In this embodiment, instead of having a vertical photogate forthe nanowire, the (p+) layer can be coated at the surface of thenanowire to help create a built-in electric field in the nanowire sothat electrons can drift easily in the upward direction. The features ofthe back-side illuminated image sensor are similar to those of the imagesensor of FIG. 3A.

FIG. 3C is an embodiment showing nano-wires on the back-side of a fullyprocessed wafer containing substrate photodiodes. In FIG. 3C, threenanowires, of different diameters are grown, and are used to select andabsorb radiations of different wavelengths Red, Green and Blue.

FIG. 3D is an embodiment showing nano-wires on the back-side of a fullyprocessed wafer containing substrate photodiodes. In FIG. 3D, twonanowires, of different diameters are grown, and used to select andabsorb radiation, and with every nanowire there is a planar photodiode,or more than one, built into the substrate. The planner photodiodesabsorb the radiation that was not allowed to propagate in the nanowires.

Examples of the structures of the backside thinned image sensor havingphotodiodes therein are shown in FIG. 4A and FIG. 4A. FIG. 4C shows anillustrative embodiment of a nanostructured waveguide with dimensionstherein. The dimensions therein are purely for illustrative purpose toshow the dimensions that one could use in an illustrative embodiment.However, other dimensions can also be used without deviating from thescope of the invention.

The BSI image sensor is useful for a variety of embodiments. Forexamples, as light detector devices by: (A) Creating the nanowire andassociate structures on a silicon area located on the back of aconventional CMOS sensor circuitry, using the BSI image sensor. Thismethod of back-illumination can be used for CCD and for enhancing theperformance of a conventional CMOS imager. See for example: “ABack-Illuminated Mega Pixel CMOS Image Sensor” by: B. Pain et all inProc 2007 Int. Image sensor Workshop, Pages 5-8, 2007; “Back-illuminatedultraviolet image sensor in silicon-on-sapphire” by: Jon Hyuk Park; E.Culurciello, in IEEE International Symposium on Circuits and Systems(ISCAS 2008) Seattle, Wash., 18-21 May 2008 Pages: 1854-1857. (B)Creating the nanowire and associate structures on an area located on topof the area that is normally designated for a photodiode. Thus, thesubstrate might be a dielectric.

The process diagrams here are for a case of silicon nanowires (NW) grownon a layer of silicon. The process can apply for growing Si NW ondielectric layer, or for III-V compound grown on the appropriatesubstrate, including Si substrate with or without a thin Molybdenumlayer.

The device structure can include a low-doped (˜3×10¹⁴/cm³) epitaxialp-type silicon, with the photo-detecting junction formed by afront-implanted n-well and the p-type epitaxial silicon. Photons enterthe detector from the backside, and the resultant photo-electrons arecollected in the front-side p-n well junction.

One embodiment can relate to a back-side illuminated image sensor havingan optical pipe on the back-side of the substrate, the optical pipecomprising a core and a cladding so as to create a capacitor surroundingnanowire. The core can be made up of three layers, a semiconductornanowire, an insulator and metal thus forming a capacitor to collect thecharge generated by the light induced carriers in the nanowire. Contactscan be made to the metal and to the semiconductor nanowire to controland detect the stored charge. The core of the embodiments can functionas a waveguide and a photodiode. The cladding can comprise a peripheralwaveguide and a peripheral photodiode located in or on the siliconsubstrate of the optical sensor.

The integrated circuit (IC) in the silicon wafer substrate mayoptionally have active devices therein, a peripheral photodiode in or onthe silicon wafer, stacking layers containing metallization layers andintermetal dielectric layers, and a passivation layer. The thickness ofthe stacking layers can generally be around 6 to 10 μm. The method ofmanufacturing the IC by planar deposition techniques is well-known topersons of ordinary skill in the art. A substrate containing the ICshown in FIG. 2 can be starting point for the manufacture of theembodiments of back-side illuminated sensor.

The substrate can then be thinned at an individual die level using aframe-thinning approach. The pixel area can be thinned down to about7-10 μm thickness (corresponding to epitaxial silicon thickness),leaving a thick peripheral region (about 1 mm wide). A surfacepassivation step can then be applied to the thinned silicon layer. Theresultant structure provides increased mechanical stability, asignificant ease of die handling, and protection against wrinkling ofthe thinned die. This approach is well suited for a CMOS imager, sincethe imager consists not only of the pixels, but the support and signalchain electronics along the periphery of the pixel array.

Backside thinning can be carried out as follows. First, the front-sideof the die would be attached to a protective wax. Then a protectiveframe on the backside would be created through deposition and patterningof a Si₃N₄ mask. The unmasked p⁺ silicon substrate (with doping about1×10¹⁹/cm³) can then be etched using hot KOH, for example, down towithin about 10.mu.m of the final silicon thickness. The remainder ofthe etching can be carried out in a bath having hydrofluoric acid,nitric acid and acetic acid solution (HF:HN0₃:CH₃COOH called HNA). HNAetches silicon through a redox reaction where the silicon oxidation rateis dependent on the doping concentration. Due to its dopingconcentration dependence, the etch-rate significantly slows down whenthe silicon substrate is etched, leaving an optically flat thin (about10 pm thick) epitaxial silicon layer. Following thinning, the front-sidewax can be removed, and the die can packaged in a standard pin-gridarray (PGA) package (with its central portion removed to let light in)using a standard wire-bonding technique.

Subsequent to thinning, delta-doping technique can optionally be usedfor surface passivation. The technique includes a low temperaturemolecular beam epitaxy (MBE) that places an extremely high density ofdopant atoms (>10₁₄ Boron/cm²) within a few atomic layers of the surfacewith no observable crystal defects and no requirement for post-growthannealing, making it compatible with post-metallization processing.Delta-doping should be carried out under ultra-high vacuum conditions(10⁻¹⁰ torr) using electron-beam evaporation of elemental silicon andthermal evaporation of elemental boron. The process steps can be asfollows. A 1 nm-thick (p+) silicon layer can be grown first, followed bydepositing about 30% of a monolayer of boron atoms. A 1.5 nm-thickcapping layer of epitaxial silicon is then grown. After removal from theMBE system, oxidation of the silicon capping layer protects the burieddelta-doped layer. The resultant optically flat surface allows easydeposition of anti-reflection coating using deposited oxides andplasma-enhanced silicon nitrides.

The subsequent steps for the manufacture of the embodiments of theback-side illuminated sensor can be as follows. The silicon nanowire ofthe embodiments disclosed herein can be made as follows. A substrate canbe silicon optionally having a silicon dioxide surface. For example, forgrowing vertically oriented nanowires, Si substrate in the (111)orientation can be used. The gold patches can normally be deposited onthis surface. The surface can be modified with a surface treatment topromote adsorption of a gold nanoparticle. Onto this modified surface,the gold nanoparticle can be formed by deposition of a gold layer,followed by removal of the gold layer over regions other than thedesired location of the gold nanoparticle. The gold nanoparticle can besurface treated to provide for steric stabilization. In other words,tethered, sterically stabilized gold nanoparticles can be used as seedsfor further synthesis of nanowires, wherein the gold nanoparticles areadsorbed to the modified silicon substrate. The degradation of diphenylsilane (DPS) forms silicon atoms. The silicon atoms attach to the goldnanoparticle and a silicon nanowire crystallizes from the goldnanoparticle seed upon saturation of the gold nanoparticle with siliconatoms. Note that the thickness and diameter of the gold particle leftbehind on the back-side surface determines the diameter of the nanowire.

In some embodiments, silicon NWs (SiNW) are grown using thevapor-liquid-solid (VLS) growth method. In this method, a metal dropletcatalyzes the decomposition of a Si-containing source gas. Silicon atomsfrom the gas dissolve into the droplet forming a eutectic liquid. Theeutectic liquid functions as a Si reservoir. As more silicon atoms enterinto solution, the eutectic liquid becomes supersaturated in silicon,eventually causing the precipitation of Si atoms. Typically, the Siprecipitates out of the bottom of the drop, resulting in bottom upgrowth of a Si—NW with the metal catalyst drop on top.

In some embodiments, gold is used as the metal catalyst for the growthof silicon NWs. Other metals, however, may be used, including, but notlimited to, Al, GA, In, Pt, Pd, Cu, Ni, Ag, and combinations thereof.Solid gold may be deposited and patterned on silicon wafers usingconventional CMOS technologies, such as sputtering, chemical vapordeposition (CVD), plasma enhanced chemical vapor deposition (PECVD),evaporation, etc. Patterning may be performed, for example, with opticallithography, electron-beam lithography, or any other suitable technique.The silicon wafer can then be heated, causing the gold to form dropletson the silicon wafer. Silicon and gold form a eutectic at 19% Au havinga melting temperature at 363° C. That is, a liquid drop of Si—Aueutectic forms at 363° C., a moderate temperature suitable for theprocessing of silicon devices.

In some embodiments, the substrates have a (111) orientation. Otherorientations, however, may also be used, including, but not limited to(100). A common silicon source gas for NW production is SiH₄. Othergases, however, may be used including, but not limited to, SiCl₄. Insome embodiments, NW growth may be conducted, for example, with SiH₄ atpressures of 80-400 mTorr and temperatures in the range of 450-600° C.In some embodiments, the temperature is in a range of 470-540° C.Typically, lower partial pressures of SiH₄ result in the production of ahigher percentage of vertical nanowires (NW). For example, at 80 mTorrpartial pressure and 470° C., up to 60% of the SiNWs grow in thevertical <111> direction. In some embodiments, NWs may be grown whichare essentially round. In other embodiments, the NW are hexagonal.

In one embodiment, NW growth is conducted in a hot wall low pressure CVDreactor. After cleaning the Si substrates with acetone and isopropanolthe samples may be dipped in a buffered HF solution to remove any nativeoxide. Successive thin Ga and Au metal layers (nominally 1-4 nm thick)may deposited on the substrates by thermal evaporation. Typically, theGa layer is deposited before the Au layer. In an embodiment, afterevacuating the CVD-chamber down to approximately 10⁻⁷ torr, thesubstrates can be heated up in vacuum to 600° C. to form metal droplets.The Si—NWs can be grown, for example, at a total pressure of 3 mbarusing a 100 sccm flow of SiH₄ (2% in a He mixture) in a temperaturerange from 500° C. to 700° C.

The size and length of the Si—NWs grown with a Au—Ga catalyst arerelatively homogeneous, with most of the wires oriented along the four<111> directions. For comparison, Si—NWs grown with a pure Au catalystnucleate and grow with lengths and diameters of the NWs more randomlydistributed. Further, NWs grown with a Au—Ga catalyst tend to have ataper along the axial direction. The tip diameters of NWs grown for along time are the same as those grown for a short time and aredetermined by the catalyst diameter. The footprints of the NWs, however,tend to increase during the course of the growth. This indicates that NWtapering is caused primarily by sidewall deposition (radial growth) ofsilicon. NWs may be grown having a diameter at the foot (base) of 1500nm, while the diameter of the tip may less than 70 nm over a length of15 μm. Further, the NW diameter is a function of growth temperature.Higher growth temperatures result in NW with smaller diameters. Forexample, the average diameter of NWs grown with the Ga/Au catalyst at600° C. is about 60 nm but the average diameter decreases down to about30 nm for growth at 500° C. Additionally, the variation in diameterstends to narrow as deposition temperature is lowered.

Using the VLS process, vertical NWs may be grown. That is, nanowireswhich are essentially perpendicular to the substrate surface. Typically,not all NW will be perfectly vertical. That is, the NWs may be tilted atan angle to the surface other than 90°. Commonly observed tilted NWsinclude, but are not limited to, the three 70.5°-inclined <111>epitaxial growth directions and three additional 70.5°-inclineddirections, which are rotated by 60°.

In addition to growing vertical NWs, the VLS process may be used to growdoped NWs. Indeed, by changing the composition of the source gases, adoping profile in the growing wire can be produced. For example, the NWcan be made p-type by adding diborane (B₂H₂) or trimethyl borane (TMB)to the source gas. Other gases that add acceptor atoms to the silicon NWmay also be used. The NW can be made n-type by adding PH₃ or AsH₃ to thesource gas. Other gases that add donor atoms to the silicon NW may alsobe used. Doping profiles which can be produced, include but are notlimited to, n-p-n, p-n-p, and p-i-n.

Additionally, other methods or variations of the VLS method may be usedto grow NWs. Other methods or variation include, but are not limited to,(1) CVD, (2) reactive atmosphere, (3) Evaporation, (4) molecular beamepitaxy (MBE), (5) laser ablation, and (6) solution methods. In the CVDprocess, a volatile gaseous silicon precursor is provided. Examplesilicon precursor gases include SiH₄ and SiCl₄. CVD may be used forepitaxial growth. Further, doping can be accomplished by adding volatiledoping precursors to the silicon precursor Annealing in a reactiveatmosphere comprises heating the substrate in a gas that reacts with thesubstrate. For example, if silicon is annealed in an atmosphereincluding hydrogen, the hydrogen locally reacts with the siliconsubstrate, forming SiH₄. The SiH₄ can then react with the catalyst metaldrop, thereby initiating NW growth. This growth process can be used fornon-CMOS processes.

In the evaporation method, a SiO₂ source is heated under conditions thatresult in the production of SiO gas. When the SiO gas adsorbs on themetal catalyst droplets, it forms Si and SiO₂. This method may also beperformed without a metal catalyst drop. Absent a metal catalyst, SiO₂has been observed to catalyze silicon NW growth. In the MBE method, ahigh purity silicon source is heated until Si atoms evaporate. A gaseousbeam of Si directed toward the substrate. The gaseous silicon atomsadsorb onto and dissolve into the metal droplet, thereby initiatinggrowth of NWs.

In the laser ablation method, a laser beam is aimed at source whichincludes both silicon and catalyst atoms. The ablated atoms cool bycolliding with inert gas molecules and condense to form droplets withthe same composition as the original target. That is, droplets havingboth silicon and catalyst atoms. The laser ablation method may also beperformed with a target consisting essentially of pure silicon. Solutionbased techniques typically use organic fluids. Specifically, the organicfluids generally comprise highly pressurized supercritical organicfluids enriched with a silicon source and catalyst particles. At areaction temperature above the metal-silicon eutectic, the siliconprecursor decomposes, forming an alloy with the metal. Uponsupersaturation, silicon precipitates out, growing the NW.

The above nanowire growth techniques are all bottom up techniques.Nanowires, however may also be fabricated with top down techniques. Topdown techniques typically involve patterning and etching a suitablesubstrate, for example silicon. Patterning can be accomplished vialithography, for, example, electron beam lithography, nanospherelithography and nanoprint lithography. Etching may be performed eitherdry or wet. Dry etching techniques include, but are not limited to,reactive ion etching. Wet etching may be performed with either standardetches or via the metal-assisted etching process. In the metal-assistedetching process, Si is wet-chemically etched, with the Si dissolutionreaction being catalyzed by the presence of a noble metal that is addedas a salt to the etching solution.

Subsequent steps can relate to the forming of one or more of thedielectric layers around the nanowire on the back-side of the substrate.For example, a conformal dielectric coating by chemical vapor deposition(CVD), atomic layer deposition (ALD), oxidation or nitration can be madearound the nanowire. Then, doped glass dielectric layer can be formed onthe conformal dielectric coating by plasma enhanced chemical vapordeposition, spin-on coating or sputtering, optionally with an initialatomic layer deposition. The deposited doped glass dielectric layer canbe etched back by chemical-mechanical planarization or other methods ofetching.

A funnel and a lens on the funnel to channel electromagnetic radiationsuch as light into the nanowire waveguide can then be made as follows:deposition of a glass/oxide/dielectric layer by CVD, sputter depositionor spin-on coating; application of a photoresist on the depositedglass/oxide/dielectric layer; removal of the photoresist outside anopening centered over the nanowire within the deep cavity; and forming acoupler by semi-isotropic etching in the glass/oxide/dielectric layer.

Subsequent steps can relate to the forming of a metal layer around theone or more dielectric layers by depositing a metal such a copper on thevertical walls of the nanowire surrounding the one or more dielectriclayers.

Another embodiment can relate to a back-side illuminated image sensorhaving an optical pipe comprising a core and a cladding with a pin or pnphotodiode in a nanowire in the core.

The core can have a pn or pin junction that induces a potential gradientin the core wire. The pn or pin junction in the core can be formed bygrowing a nanowire and doping the nanowire core while it is growing as apin junction. For example, the doping of the nanowire can have twolevels of doping to form n and p, or in other embodiments, the nanowirecan comprise p, i and n regions to form a pin photodiode. Yet, anotherpossibility is doping the wire along its length in concentric circles toform p and n or p, i and n regions to form a pn or pin photodiode. Thepn or pin junction nanowire (also referred to as a pn or pin photodiode)is contacted at the appropriate points along pn or pin junction nanowireusing the various metal layers that are part of any device to detect thecharge generated by the light induced carriers in the pn or pin junctionnanowire. The cladding of the embodiments can comprise a peripheralwaveguide and a peripheral photodiode located in or on the siliconsubstrate of the optical sensor.

The method of making the embodiments wherein the nanowire has a pn orpin junction is similar in many ways to the method of making theembodiment where the optical pipe has a capacitor type photodiodedescribed above except that a modified version of the nanowire growthstep is carried out, the step of depositing a conformal dielectriccoating is omitted, and the step of depositing a metal on the verticalwalls of the nanowire is omitted.

The nanowire growth step includes growing a nanowire having two or moredifferent doped regions to form a pn phototdiode by growing a N-doped(n-doped) nanowire followed by growing a P-doped (p-doped) nanowire or apin photodiode by first growing a N-doped (n-doped) nanowire, thengrowing an I-doped nanowire (also referred to as the I-region of thenanowire), and finally growing a p-doped nanowire. The doping of thenanowire can be carried out by methods well known in the art.

In one embodiment, a shallow p-type implant can be disposed in thebackside of the substrate. P-type implant can prevent electrons fromwithin the substrate from gathering at backside surface of thesubstrate. If allowed to gather at the backside surface, these electronscan cause a portion of the incident light to be reflected, diminishingthe amount of light incident on pixel array.

While preferably no color filter is disposed in the BSI image sensor, inone embodiment, a color filter array can be disposed on the backside ofthe substrate. Color filter array filters the light by color before thelight illuminates the backside of the substrate. In one embodiment, ananti-reflective layer may be disposed on the substrate. Theanti-reflective layer further reduces the reflection of incident lightfrom the backside surface of the substrate. Alternatively, ananti-reflection layer may be disposed in other regions, for example,between the image sensor and an integrated lens stack.

Integrated lens stack can serve many purposes, such as focusing light,attenuating light, or concentrating one wavelength of light on thebackside of the substrate. Integrated lens stack may include layers suchas collimating lenses, focusing lenses, spacers, and mirrored layers. Inone embodiment, the layers of integrated lens stack can be bondedtogether using a thermosetting resin. Alternatively, the layers ofintegrated lens stack can be coupled together using a UV-setting bondingprocess or another type of bonding process. Integrated lens stack alsoprovides additional mechanical support. Embodiments of integrated lensstack with five lens layers or two lens layers can be commerciallyobtained through Anteryon BV, The Netherlands. Alternatively, integratedlens stacks with different numbers of lens layers from other lensmanufacturers can be used.

In one embodiment, the backside surface is thinned until the substrateof image sensor wafer is approximately 1-10 micrometers thick,facilitating the detection of visible light. In an alternativeembodiment, the backside of image sensor wafer is the proper depth tofacilitate the detection of selected wavelengths of electromagneticradiation, such as infrared light.

In one embodiment the pixel array is located, as much as possible,approximately in the center of a die, with electronics surrounding pixelarray. Alternatively, pixel array can be located off-center on die, withelectronics distributed on the remainder of die.

It should be noted that the backside thinned image sensor with anintegrated lens stack discussed herein might be used in variousapplications. In one embodiment, backside thinned image sensor with anintegrated lens stack may be used in a digital camera system, forexample, for general-purpose photography (e.g., camera phone, stillcamera, video camera) or special-purpose photography. Digital camera caninclude a display, device, and subsystems that are coupled together viabus. The subsystems may include, for example, hardware, firmware and/orsoftware for storage, control, and interface operations of the camerasystem that are known to one of ordinary skill in the art; accordingly,a detailed description is not provided. Alternatively, image sensor canbe used in other types of applications, for example, machine vision,document scanning, microscopy, security, biometrics, etc.

According to the embodiments of the invention, strategies for minimizingthe reflection of incident light on the substrate of the cavity is toprovide an anti-reflective coating in or on the substrate of the cavity.An anti-reflective coating acts to reduce the reflection at the surface,allowing a higher level of visible light transmission. Anti-reflectiveor antireflection (AR) coatings are a type of optical coating applied tothe surface of optical devices to reduce reflection. This improves theefficiency of the system since less light is lost. The methods forimplementing anti-reflective coatings include the use of alternatinglayers of a low-index material like silica and a higher-index materialto obtain reflectivity as low as 0.1% at a single wavelength or over arange of wavelengths.

In one embodiment, the anti-reflective material can work near a singlelight frequency. Other embodiments can use a green antireflectivecoating, for example, on the substrate of the cavity containing the blueabsorbing nanowire, and a red anti-reflective coating with a cyanabsorbing nanowire.

Many AR coatings have transparent thin film structures with alternatinglayers of contrasting refractive index. Layer thicknesses are chosen toproduce destructive interference in the beams reflected from theinterfaces, and constructive interference in the correspondingtransmitted beams. This makes the structure's performance change withwavelength and incident angle, so that color effects often appear atoblique angles. A wavelength range must be specified when designing orordering such coatings, but good performance can often be achieved for arelatively wide range of frequencies: usually a choice of IR, visible,or UV is offered.

The simplest interference AR coating can be a single quarter-wave layerof transparent material whose refractive index is the square root of thesubstrate's refractive index. This theoretically gives zero reflectanceat the center wavelength and decreased reflectance for wavelengths in abroad band around the center. By using alternating layers of a low-indexmaterial like silica and a higher-index material it is possible toobtain reflectivities as low as 0.1% at a single wavelength.

One embodiment of the AR coating can be ultraviolet anti-reflection(UAR) coating. This ultraviolet anti-reflection coating can reducesurface reflection from quartz, fused silica, semiconductor siliconsubstrates to less than 0.3% from 0.2 to 0.3 microns. UAR coatings aredesigned to promote effective transmission of light in the ultravioletwavelengths.

Anti-reflective coatings include several different sub-layers comprisingmany different materials such as, but not limited to, Al₂O₃, ZrO₃, MgF₂,SiO₂, cryolite, LiF. ThF₄, CeF₃, PbF₂, ZnS, ZnSc, Si, Te, MgO, Y₂O₃,Sc₂O₃, SiO, HfO₂, ZrO₂, CeO₂, Nb₂O₃, Ta₂O₅, and TiO₂. The thickness ofeach sublayer is often related to an even whole number division of thewavelength of light that is most preferred to be transmitted through thecoated material.

In other embodiments, the can be multiple nanowires in a single deepcavity as shown in FIG. 5 wherein at the bottom is a silicon substrateon which there is an array of nanowires over which is a coupler (shownas an oval), and over the coupler is a region (shown as rectangular box)through which light comes in to the coupler.

The recognition of color and luminance by the embodiments of the imagesensors can be done by color reconstruction. Each compound pixel hascomplete luminance information obtained by combining its twocomplementary outputs. As a result, the same image sensor can be usedeither as a full resolution black and white or full color sensor.

The color reconstruction can be done to obtain full color information bythe appropriate combination of two adjacent pixels, which can be oneembodiment of a compound pixel, either horizontally or vertically. Thesupport over which color information is obtained is less than thedimension of two pixels as opposed to 4 for the Bayer pattern.

Each physical pixel of a device containing an image sensor of theembodiments disclosed herein can have two outputs representing thecomplementary colors, e.g., cyan, red (C, R) designated as output type 1or yellow, blue (Y, B) designated as output type 2 as shown in FIG. 6.These four outputs of two pixels of a compound pixel can be resolved toreconstruct a full color scene of an image viewed by a device containingthe image sensors of the embodiments described herein. At least some ofthe two pixels can have two outputs representing the complementarycolors, e.g., white-Red, Red (W-R, R) designated as output type 1 orwhite-Blue, Blue (W-B, B) designated as output type 2. FIG. 7 shows anarray of nanostructured waveguides showing 3 types of color pixels (red,green, and blue in conventional tessellation). Note that 2 color pixelsonly (for example, blue and green) can be also used when planarphotodiodes are added, in each pixel, to the nanowire photodetector.

All references, including but not limited to patents, patentapplications, and non-patent literature are hereby incorporated byreference herein in their entirety.

While various aspects and embodiments have been disclosed herein, otheraspects and embodiments will be apparent to those skilled in the art.The various aspects and embodiments disclosed herein are for purposes ofillustration and are not intended to be limiting, with the true scopeand spirit being indicated by the following claims.

We claim:
 1. A device comprising a substrate, a waveguide comprising ananowire disposed on or within the substrate, wherein the nanowirecomprises a core; wherein the nanowire is configured to separate at aselective wavelength an electromagnetic radiation incident on thenanowire so that a first portion with wavelengths up to the selectivewavelength of the electromagnetic radiation transmits through the coreand a second portion with wavelengths beyond the selective wavelength ofthe electromagnetic radiation transmits outside the core.
 2. The deviceof claim 1, further comprising a first image sensing circuit configuredto detect the first portion of the electromagnetic radiation.
 3. Thedevice of claim 1, further comprising a second image sensing circuitconfigured to detect the second portion of the electromagneticradiation.
 4. The device of claim 2, wherein the first image sensingcircuit is in the core.
 5. The device of claim 3, wherein the secondimage sensing circuit surrounds the core.
 6. The device of claim 1,further comprising a lens structure or an optical coupler over thenanowire, wherein the lens structure or the optical coupler is operablycoupled to the nanowire.
 7. The device of claim 1, further comprising ananti-reflective layer disposed on the substrate.
 8. The device of claim1, wherein the first image sensing circuit and the second image sensingcircuit are selected from a group consisting of a photodiode, a chargestorage capacitor, and combinations thereof.
 9. The device of claim 1,wherein the device is an image sensor.
 10. The device of claim 1,wherein the selective wavelength is a function of the diameter of thenanowire.
 11. The device of claim 1, further comprising a verticalphotogate.
 12. The device of claim 1, wherein the first imaging circuitcomprises a pn or pin junction.
 13. The device of claim 1, furthercomprising a cladding and a metal layer around the core, wherein thecore, the cladding and the metal form a capacitor that is configured tocollect excitons generated in the nanowire and store charge in thecapacitor.
 14. The device of claim 13, further comprising metal contactsthat connect to the metal layer and nanowire to control and detect thecharge stored in the capacitor.
 15. The device of claim 1, furthercomprising a cladding surrounding the core, wherein the claddingcomprises a passive waveguide.
 16. The device of claim 3, wherein thesecond image sensing circuit is located on or within the substrate. 17.A compound light detector comprising at least two different devices, thedevice comprising a substrate having a front side and a back-side thatis exposed to incoming radiation, a waveguide comprising a nanowiredisposed on or within the substrate and an image sensing circuitdisposed on the front side, wherein the nanowire is configured to beboth a channel to transmit wavelengths of the incoming radiation up to aselective wavelength and an active element to detect the wavelengths ofthe incoming radiation up to the selective wavelength transmittedthrough the nanowire, and the compound light detector is configured toreconstruct a spectrum of wavelengths of an electromagnetic radiationbeam; wherein a region outside the core is configured to be a channel totransmit the wavelengths of the electromagnetic radiation beam that donot transmit through the nanowire.
 18. The compound light detector ofclaim 17, wherein the at least two different devices have nanowireshaving different diameters.
 19. The compound light detector of claim 17,wherein the region comprises cladding comprising more than one layers,wherein the more than one layers have indices of refractionconsecutively smaller than an index of refraction the nanowire, whereinthe cladding comprises of one or more different materials, wherein thecladding permits electromagnetic radiation of wavelengths beyond theselective wavelength to remains within the cladding and be transmittedto a peripheral photosensitive element.
 20. The compound light detectorof claim 17, wherein the spectrum of wavelengths comprises wavelengthsof visible light, IR or combinations thereof.
 21. The compound lightdetector of claim 17, wherein a first device comprises a core of adifferent diameter than that of a second device and the spectrum ofwavelengths comprises wavelengths of visible light, IR or combinationsthereof.
 22. The compound light detector of claim 17, wherein thecompound light detector is configured to resolve black and white orluminescence information contained in the electromagnetic radiationbeam.
 23. The compound light detector of claim 17, wherein the compoundlight detector is configured to detect energies of the electromagneticradiation of four different ranges of wavelengths.
 24. The compoundlight detector of claim 23, wherein the energies of the electromagneticradiation of the four different ranges of wavelengths are combined toconstruct red, green and blue colors.
 25. The compound light detector ofclaim 17, wherein at least some of the at least one of the devices doesnot include a color or infra-red filter.
 26. The device of claim 1,further comprising a color or IR filter.
 27. A device comprising asubstrate having a front side, a back-side exposed to incoming radiationcomprising infrared light, a waveguide comprising a nanowire disposed onor within the substrate, and an image sensing circuit disposed on thefront side, wherein the nanowire is configured to be both a channel totransmit the infrared light and an active element to detect the infraredlight.
 28. The device of claim 27, further comprising a filter thatpredominantly cuts off visible light and passes infrared light.
 29. Thedevice of claim 27, wherein the nanowire comprises GaAs.
 30. The deviceof claim 27, further comprising a planar photodetector configured todetect infrared light.
 31. The device of claim 30, wherein the planarphotodetector comprises GaAs.
 32. The device of claim 27, wherein thedevice further comprises a cladding.
 33. The device of claim 32, whereinthe cladding is configured to be a channel to transmit the wavelengthsof the electromagnetic radiation beam that do not transmit through thenanowire.
 34. The device of claim 32, and wherein the cladding comprisesmore than one layers.
 35. The device of claim 34, wherein the more thanone layers have indices of refraction consecutively smaller than anindex of refraction the nanowire.
 36. The device of claim 27, whereinthe nanowire comprises a semiconductor.
 37. The device of claim 27,further comprising a lens structure or an optical coupler over thenanowire, wherein the lens structure or the optical coupler is operablycoupled to the nanowire.
 38. The device of claim 27, further comprisingan anti-reflective layer disposed on the substrate.
 39. The device ofclaim 27, wherein the active element is configured to be a photodiode, acharge storage capacitor, or combinations thereof.
 40. The device ofclaim 27, wherein the device is an image sensor.
 41. The device of claim27, further comprising a vertical photogate.
 42. The device of claim 27,wherein the nanowire is configured to convert energy of theelectromagnetic radiation transmitted through the nanowire and togenerate electron hole-pairs (excitons).
 43. The device of claim 42,wherein the nanowire comprises a pn or pin junction that is configuredto detect the excitons generated in the nanowire.
 44. The device ofclaim 42, further comprising an insulator layer around the nanowire anda metal layer around the insulator layer to form a capacitor that isconfigured to collect the excitons generated in the nanowire and storecharge in the capacitor.
 45. The device of claim 44, further comprisingmetal contacts that connect to the metal layer and nanowire to controland detect the charge stored in the capacitor.
 46. The device of claim32, wherein the cladding comprises a passive waveguide.
 47. The deviceof claim 32, further comprising a peripheral photosensitive element,wherein the peripheral photosensitive element is operably coupled to thecladding.
 48. The device of claim 47, wherein the peripheralphotosensitive element is located on or within a substrate.